Air Products' New Electronic Materials Facility in Banwol, Korea On-Line

Air Products APD today announced that its new electronic materials facility in Banwol, Korea has completed start-up and is successfully on-line. The newly commercialized materials produced at this facility will enable semiconductor manufacturers to create advanced generation devices. As device geometries continue to shrink in size, there are increasing needs for new dielectric materials to address process needs such as lower thermal budget and filling of nanometer-scale features. The Banwol facility enables flexible manufacturing of a wide variety of new dielectric products. "The new materials produced at our Banwol facility, such as our AP-LTO® and AP-LTN® product lines, will enable deposition of silicon nitride and oxide films by Atomic Layer Deposition, Plasma Enhanced Atomic Layer Deposition, and Chemical Vapor Deposition for a variety of emerging applications including spacers, sacrificial films, protection layers, etch stops and diffusion barriers," said John Langan, director of technology, Electronics for Air Products. The materials manufactured at the Banwol facility will be incorporated into devices like NAND Flash memory for portable electronics, DRAM to boost computer operating systems, advanced logic applications, and telecom applications like smart phones. In many cases, Air Products' new materials are developed and tested for performance with, and supplied to, industry leading tool suppliers and semiconductor manufacturers.