New NanoCD Suite Improves OCD Process Control

Nanometrics Incorporated NANO today announced a new release of NanoCDTM Suite, a turnkey optical critical dimension analysis solution with advanced modeling and recipe building capabilities. The suite, which is composed of high-performance software and hardware components, addresses process control requirements for semiconductor devices in production at 2x nm nodes and development at 1x nm nodes. The new product incorporates NanoDiffractTM 3.0, a proprietary OCD software engine broadly adopted by the world's leading memory and logic customers and production proven at 2x nm technology nodes.