Nanometrics Wins Multi-System Order for Integrated Metrology

Nanometrics Incorporated NANO, today announced that its IMPULSE integrated metrology optical critical dimension and film analysis system has been selected by a major Korean memory manufacturer for chemical mechanical planarization process control. The decision makes the Nanometrics IMPULSE system “tool-of-record” for CMP control of NAND Flash memory in high-volume manufacturing at the 2x nm node. The IMPULSE was selected over competitive offerings following an extended technical evaluation.