FSI International Receives Multiple ORION System Orders

FSI International, Inc. FSII, a leading manufacturer of surface conditioning equipment for icroelectronics manufacturing, announced today that it received multiple ORION^® single wafer cleaning system orders. The orders were received during the third quarter of fiscal 2011 and are expected to ship in the second half of calendar 2011. One customer is a memory producer that plans to use the system for front-end-of-line wet photoresist strip and middle-of-line metal etch applications. Increasingly, memory manufacturers are transitioning from batch immersion to single wafer technology to improve defectivity and cycle time performance. The ORION^® system with its inherent short process times and integrated atomized spray bar provides these benefits.