FSI International Receives ANTARES Order

FSI International, Inc. FSII announced today that a leading Asia-based foundry has ordered an ANTARES CryoKinetic Cleaning System. The evaluation system will be used for particle removal after in-line wafer testing and other high defectivity steps to focus on improving overall device yield. The system is expected to ship in January 2011. FSI has over 150 ANTARES process chambers in production at foundry and logic device producers worldwide.